Semiconductor Parts Cleaning Market Analysis:
The global Semiconductor Parts Cleaning Market was valued at 875 million in 2024 and is projected to reach US$ 1416 million by 2031, at a CAGR of 7.3% during the forecast period.
Semiconductor Parts Cleaning Market Overview
Semiconductor chamber parts cleaning lagged behind the “Ultra-Clean Revolution” which is central in discussing all other semiconductor process inputs (i.e., gases, chemicals and silicon). Every other semiconductor process input has a Certificate of Analysis (COA)?even new parts. However, recycled chamber part cleanliness varies significantly in particle levels and atomic level contamination. This is partly because standard practice used the tools themselves to perform the final cleaning of the parts. Verifying cleanliness targets was achieved by using many test wafers, expensive wafer metrology and wasted production time. Cleaning is a process to remove contaminants such as particles and ionic impurities of equipment parts generated during customers’ process.
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Semiconductor Parts Cleaning Key Market Trends :
· Rising Demand from Advanced Nodes
As semiconductor nodes shrink to 3nm and below, the need for ultra-clean chamber parts has increased, especially for ALD, CVD, and Etch processes.
· Shift from In-house to Outsourced Cleaning
OEMs and fabs are increasingly outsourcing cleaning services to specialists, ensuring higher quality and consistency.
· Regional Expansion in Taiwan and China
With TSMC and UMC driving production growth, Taiwan leads the demand for chamber part cleaning, holding over 82% market share in 2023.
· Focus on Cleanroom Standards and COA Compliance
There’s a growing push toward standardized cleanliness verification with COA for recycled parts, aligning with the ultra-clean manufacturing trend.
· Sustainability and Waste Reduction
As fabs aim to reduce waste and operational costs, the reuse and precision cleaning of expensive chamber parts is gaining momentum.
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Total Market by Segment:
Global Semiconductor Parts Cleaning market, by Type, 2020-2025, 2026-2031 ($ millions)
Global Semiconductor Parts Cleaning market segment percentages, by Type, 2024 (%)
300mm Equipment Parts
200mm Equipment Parts
150mm and Others
Global Semiconductor Parts Cleaning market, by Application, 2020-2025, 2026-2031 ($ millions)
Global Semiconductor Parts Cleaning market segment percentages, by Application, 2024 (%)
Semiconductor Etching Equipment Parts
Semiconductor Thin Film (CVD/PVD)
Lithography Machines
Ion Implant
Diffusion Equipment Parts
CMP Equipment Parts
Others
Competitor Analysis
The report also provides analysis of leading market participants including:
Key companies Semiconductor Parts Cleaning revenues in global market, 2020-2025 (estimated), ($ millions)
Key companies Semiconductor Parts Cleaning revenues share in global market, 2024 (%)
Further, the report presents profiles of competitors in the market, key players include:
UCT (Ultra Clean Holdings, Inc)
Kurita (Pentagon Technologies)
Enpro Industries (LeanTeq and NxEdge)
TOCALO Co., Ltd.
Mitsubishi Chemical (Cleanpart)
KoMiCo
Cinos
Hansol IONES
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FAQs
Q: What are the key driving factors and opportunities in the Semiconductor Parts Cleaning market?
A: Key drivers include advanced node manufacturing, rising ALD/CVD use, and Taiwan’s IC boom. Opportunities lie in 5G, AI, and Southeast Asian foundry expansions.
Q: Which region is projected to have the largest market share?
A: Taiwan is projected to hold the largest share, driven by leading players like TSMC, with over 82% of the regional market revenue in 2023.
Q: Who are the top players in the global Semiconductor Parts Cleaning market?
A: Key players include UCT, Kurita (Pentagon Technologies), Enpro Industries, TOCALO, Mitsubishi Chemical, KoMiCo, and Frontken.
Q: What are the latest technological advancements in the industry?
A: Recent advances include plasma-based dry cleaning, automation in part handling, and real-time particle contamination detection.
Q: What is the current size of the global Semiconductor Parts Cleaning market?
A: The market was valued at USD 875 million in 2024 and is projected to reach USD 1416 million by 2031, growing at a CAGR of 7.3%.
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